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Methodology for Studying Nanoscale Details of Focused Ion Beam Gas-Assisted Etching and Deposition by TEM and Numerical Modeling
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- Journal:
- Microscopy and Microanalysis / Volume 21 / Issue S3 / August 2015
- Published online by Cambridge University Press:
- 23 September 2015, pp. 1843-1844
- Print publication:
- August 2015
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- Article
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